JPS6193670U - - Google Patents

Info

Publication number
JPS6193670U
JPS6193670U JP17874384U JP17874384U JPS6193670U JP S6193670 U JPS6193670 U JP S6193670U JP 17874384 U JP17874384 U JP 17874384U JP 17874384 U JP17874384 U JP 17874384U JP S6193670 U JPS6193670 U JP S6193670U
Authority
JP
Japan
Prior art keywords
seal
pressurized fluid
heater
side member
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17874384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17874384U priority Critical patent/JPS6323654Y2/ja
Publication of JPS6193670U publication Critical patent/JPS6193670U/ja
Application granted granted Critical
Publication of JPS6323654Y2 publication Critical patent/JPS6323654Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mechanical Sealing (AREA)
JP17874384U 1984-11-27 1984-11-27 Expired JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17874384U JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-27 1984-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17874384U JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-27 1984-11-27

Publications (2)

Publication Number Publication Date
JPS6193670U true JPS6193670U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-17
JPS6323654Y2 JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-29

Family

ID=30736309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17874384U Expired JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-27 1984-11-27

Country Status (1)

Country Link
JP (1) JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7238558B2 (en) 1993-06-30 2007-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
JP2011231880A (ja) * 2010-04-28 2011-11-17 Mitsubishi Heavy Ind Ltd ドライガスシール構造
JP2019521277A (ja) * 2016-06-30 2019-07-25 ゼネラル・エレクトリック・カンパニイ ターボ機械および対応する面シールアセンブリの組立方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6823559B2 (ja) * 2017-07-07 2021-02-03 日本ピラー工業株式会社 軸封装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7238558B2 (en) 1993-06-30 2007-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
JP2011231880A (ja) * 2010-04-28 2011-11-17 Mitsubishi Heavy Ind Ltd ドライガスシール構造
JP2019521277A (ja) * 2016-06-30 2019-07-25 ゼネラル・エレクトリック・カンパニイ ターボ機械および対応する面シールアセンブリの組立方法

Also Published As

Publication number Publication date
JPS6323654Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-29

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