JPS6192622U - - Google Patents
Info
- Publication number
- JPS6192622U JPS6192622U JP1984176705U JP17670584U JPS6192622U JP S6192622 U JPS6192622 U JP S6192622U JP 1984176705 U JP1984176705 U JP 1984176705U JP 17670584 U JP17670584 U JP 17670584U JP S6192622 U JPS6192622 U JP S6192622U
- Authority
- JP
- Japan
- Prior art keywords
- roller
- ultra
- high vacuum
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chain Conveyers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984176705U JPS6192622U (show.php) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984176705U JPS6192622U (show.php) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192622U true JPS6192622U (show.php) | 1986-06-16 |
Family
ID=30734298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984176705U Pending JPS6192622U (show.php) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192622U (show.php) |
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1984
- 1984-11-22 JP JP1984176705U patent/JPS6192622U/ja active Pending