JPS6192581U - - Google Patents

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Publication number
JPS6192581U
JPS6192581U JP17696384U JP17696384U JPS6192581U JP S6192581 U JPS6192581 U JP S6192581U JP 17696384 U JP17696384 U JP 17696384U JP 17696384 U JP17696384 U JP 17696384U JP S6192581 U JPS6192581 U JP S6192581U
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JP
Japan
Prior art keywords
robot
original position
light
tip
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17696384U
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English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17696384U priority Critical patent/JPS6192581U/ja
Publication of JPS6192581U publication Critical patent/JPS6192581U/ja
Pending legal-status Critical Current

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JP17696384U 1984-11-21 1984-11-21 Pending JPS6192581U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17696384U JPS6192581U (enrdf_load_stackoverflow) 1984-11-21 1984-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17696384U JPS6192581U (enrdf_load_stackoverflow) 1984-11-21 1984-11-21

Publications (1)

Publication Number Publication Date
JPS6192581U true JPS6192581U (enrdf_load_stackoverflow) 1986-06-16

Family

ID=30734538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17696384U Pending JPS6192581U (enrdf_load_stackoverflow) 1984-11-21 1984-11-21

Country Status (1)

Country Link
JP (1) JPS6192581U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126543A (ja) * 1997-07-07 1999-01-29 Dainippon Screen Mfg Co Ltd 基板搬送装置の位置決め方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126543A (ja) * 1997-07-07 1999-01-29 Dainippon Screen Mfg Co Ltd 基板搬送装置の位置決め方法およびその装置

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