JPS6192186U - - Google Patents

Info

Publication number
JPS6192186U
JPS6192186U JP17508284U JP17508284U JPS6192186U JP S6192186 U JPS6192186 U JP S6192186U JP 17508284 U JP17508284 U JP 17508284U JP 17508284 U JP17508284 U JP 17508284U JP S6192186 U JPS6192186 U JP S6192186U
Authority
JP
Japan
Prior art keywords
linear motor
mover
single winding
steel belt
steel wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17508284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0122392Y2 (US06534493-20030318-C00166.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17508284U priority Critical patent/JPH0122392Y2/ja
Publication of JPS6192186U publication Critical patent/JPS6192186U/ja
Application granted granted Critical
Publication of JPH0122392Y2 publication Critical patent/JPH0122392Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP17508284U 1984-11-20 1984-11-20 Expired JPH0122392Y2 (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17508284U JPH0122392Y2 (US06534493-20030318-C00166.png) 1984-11-20 1984-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17508284U JPH0122392Y2 (US06534493-20030318-C00166.png) 1984-11-20 1984-11-20

Publications (2)

Publication Number Publication Date
JPS6192186U true JPS6192186U (US06534493-20030318-C00166.png) 1986-06-14
JPH0122392Y2 JPH0122392Y2 (US06534493-20030318-C00166.png) 1989-06-30

Family

ID=30732686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17508284U Expired JPH0122392Y2 (US06534493-20030318-C00166.png) 1984-11-20 1984-11-20

Country Status (1)

Country Link
JP (1) JPH0122392Y2 (US06534493-20030318-C00166.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224662A (ja) * 1987-03-11 1988-09-19 Shinko Electric Co Ltd リニアパルスモ−タ
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224662A (ja) * 1987-03-11 1988-09-19 Shinko Electric Co Ltd リニアパルスモ−タ
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置
JP4583903B2 (ja) * 2004-12-15 2010-11-17 日本電子株式会社 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH0122392Y2 (US06534493-20030318-C00166.png) 1989-06-30

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