JPS6191370U - - Google Patents
Info
- Publication number
- JPS6191370U JPS6191370U JP17511184U JP17511184U JPS6191370U JP S6191370 U JPS6191370 U JP S6191370U JP 17511184 U JP17511184 U JP 17511184U JP 17511184 U JP17511184 U JP 17511184U JP S6191370 U JPS6191370 U JP S6191370U
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- holder
- guide groove
- head
- rotational axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 230000005484 gravity Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511184U JPH0315172Y2 (cs) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17511184U JPH0315172Y2 (cs) | 1984-11-20 | 1984-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6191370U true JPS6191370U (cs) | 1986-06-13 |
| JPH0315172Y2 JPH0315172Y2 (cs) | 1991-04-03 |
Family
ID=30732715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17511184U Expired JPH0315172Y2 (cs) | 1984-11-20 | 1984-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315172Y2 (cs) |
-
1984
- 1984-11-20 JP JP17511184U patent/JPH0315172Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315172Y2 (cs) | 1991-04-03 |