JPS6190247U - - Google Patents

Info

Publication number
JPS6190247U
JPS6190247U JP17448484U JP17448484U JPS6190247U JP S6190247 U JPS6190247 U JP S6190247U JP 17448484 U JP17448484 U JP 17448484U JP 17448484 U JP17448484 U JP 17448484U JP S6190247 U JPS6190247 U JP S6190247U
Authority
JP
Japan
Prior art keywords
support member
rod
limit switch
push
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17448484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17448484U priority Critical patent/JPS6190247U/ja
Publication of JPS6190247U publication Critical patent/JPS6190247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP17448484U 1984-11-17 1984-11-17 Pending JPS6190247U (US06229276-20010508-P00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17448484U JPS6190247U (US06229276-20010508-P00022.png) 1984-11-17 1984-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17448484U JPS6190247U (US06229276-20010508-P00022.png) 1984-11-17 1984-11-17

Publications (1)

Publication Number Publication Date
JPS6190247U true JPS6190247U (US06229276-20010508-P00022.png) 1986-06-12

Family

ID=30732102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17448484U Pending JPS6190247U (US06229276-20010508-P00022.png) 1984-11-17 1984-11-17

Country Status (1)

Country Link
JP (1) JPS6190247U (US06229276-20010508-P00022.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111758A (en) * 1978-02-22 1979-09-01 Hitachi Ltd Heat treatment unit and boat pick up method from heat treatment unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111758A (en) * 1978-02-22 1979-09-01 Hitachi Ltd Heat treatment unit and boat pick up method from heat treatment unit

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