JPS6190238U - - Google Patents

Info

Publication number

JPS6190238U

JPS6190238U JP17521784U JP17521784U JPS6190238U JP S6190238 U JPS6190238 U JP S6190238U JP 17521784 U JP17521784 U JP 17521784U JP 17521784 U JP17521784 U JP 17521784U JP S6190238 U JPS6190238 U JP S6190238U

Authority

JP

Japan

Prior art keywords

rod

rods

boat

cvd

plate

Prior art date

1984-11-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000010453 quartz Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 235000012431 wafers Nutrition 0.000 claims 2
• 238000005137 deposition process Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1