JPS6189854U - - Google Patents

Info

Publication number
JPS6189854U
JPS6189854U JP1984175107U JP17510784U JPS6189854U JP S6189854 U JPS6189854 U JP S6189854U JP 1984175107 U JP1984175107 U JP 1984175107U JP 17510784 U JP17510784 U JP 17510784U JP S6189854 U JPS6189854 U JP S6189854U
Authority
JP
Japan
Prior art keywords
pellicle
film
metal frame
coated
transparent conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984175107U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984175107U priority Critical patent/JPS6189854U/ja
Publication of JPS6189854U publication Critical patent/JPS6189854U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
JP1984175107U 1984-11-20 1984-11-20 Pending JPS6189854U (US07488766-20090210-C00029.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984175107U JPS6189854U (US07488766-20090210-C00029.png) 1984-11-20 1984-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984175107U JPS6189854U (US07488766-20090210-C00029.png) 1984-11-20 1984-11-20

Publications (1)

Publication Number Publication Date
JPS6189854U true JPS6189854U (US07488766-20090210-C00029.png) 1986-06-11

Family

ID=30732711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984175107U Pending JPS6189854U (US07488766-20090210-C00029.png) 1984-11-20 1984-11-20

Country Status (1)

Country Link
JP (1) JPS6189854U (US07488766-20090210-C00029.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020020984A (ja) * 2018-08-01 2020-02-06 旭化成株式会社 ペリクル及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113577A (US07488766-20090210-C00029.png) * 1974-06-19 1976-02-03 Western Electric Co
JPS55161240A (en) * 1979-06-04 1980-12-15 Dainippon Printing Co Ltd Photomask
JPS5741639A (en) * 1980-08-25 1982-03-08 Fujitsu Ltd Treatment of photomask to provide electric conductivity

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113577A (US07488766-20090210-C00029.png) * 1974-06-19 1976-02-03 Western Electric Co
JPS55161240A (en) * 1979-06-04 1980-12-15 Dainippon Printing Co Ltd Photomask
JPS5741639A (en) * 1980-08-25 1982-03-08 Fujitsu Ltd Treatment of photomask to provide electric conductivity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020020984A (ja) * 2018-08-01 2020-02-06 旭化成株式会社 ペリクル及びその製造方法

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