JPS6189853U - - Google Patents

Info

Publication number

JPS6189853U

JPS6189853U JP1984174260U JP17426084U JPS6189853U JP S6189853 U JPS6189853 U JP S6189853U JP 1984174260 U JP1984174260 U JP 1984174260U JP 17426084 U JP17426084 U JP 17426084U JP S6189853 U JPS6189853 U JP S6189853U

Authority

JP

Japan

Prior art keywords

frame

membrane

attached

pellicle membrane

adhesion prevention

Prior art date

1984-11-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012528 membrane Substances 0.000 claims description 8
• 239000000428 dust Substances 0.000 claims description 5
• 230000002265 prevention Effects 0.000 claims description 5
• 239000000853 adhesive Substances 0.000 claims description 3
• 230000001070 adhesive effect Effects 0.000 claims description 3
• 239000003566 sealing material Substances 0.000 claims 1
• 239000002390 adhesive tape Substances 0.000 description 2
• 230000001681 protective effect Effects 0.000 description 2