JPS6189852U - - Google Patents

Info

Publication number
JPS6189852U
JPS6189852U JP1984174259U JP17425984U JPS6189852U JP S6189852 U JPS6189852 U JP S6189852U JP 1984174259 U JP1984174259 U JP 1984174259U JP 17425984 U JP17425984 U JP 17425984U JP S6189852 U JPS6189852 U JP S6189852U
Authority
JP
Japan
Prior art keywords
pellicle
membrane
fixed frame
attached
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984174259U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984174259U priority Critical patent/JPS6326821Y2/ja
Publication of JPS6189852U publication Critical patent/JPS6189852U/ja
Application granted granted Critical
Publication of JPS6326821Y2 publication Critical patent/JPS6326821Y2/ja
Expired legal-status Critical Current

Links

JP1984174259U 1984-11-19 1984-11-19 Expired JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984174259U JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-19 1984-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984174259U JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-19 1984-11-19

Publications (2)

Publication Number Publication Date
JPS6189852U true JPS6189852U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-11
JPS6326821Y2 JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-20

Family

ID=30731885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984174259U Expired JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-11-19 1984-11-19

Country Status (1)

Country Link
JP (1) JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6326821Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-20

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