JPS6189689U - - Google Patents

Info

Publication number
JPS6189689U
JPS6189689U JP17141084U JP17141084U JPS6189689U JP S6189689 U JPS6189689 U JP S6189689U JP 17141084 U JP17141084 U JP 17141084U JP 17141084 U JP17141084 U JP 17141084U JP S6189689 U JPS6189689 U JP S6189689U
Authority
JP
Japan
Prior art keywords
air intake
pipe
intake pipe
heat exchanger
check valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17141084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17141084U priority Critical patent/JPS6189689U/ja
Publication of JPS6189689U publication Critical patent/JPS6189689U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Check Valves (AREA)
JP17141084U 1984-11-12 1984-11-12 Pending JPS6189689U (US06373033-20020416-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17141084U JPS6189689U (US06373033-20020416-M00002.png) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17141084U JPS6189689U (US06373033-20020416-M00002.png) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6189689U true JPS6189689U (US06373033-20020416-M00002.png) 1986-06-11

Family

ID=30729094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17141084U Pending JPS6189689U (US06373033-20020416-M00002.png) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6189689U (US06373033-20020416-M00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015129612A (ja) * 2014-01-08 2015-07-16 東京エレクトロン株式会社 熱交換システム及び同熱交換システムを有する基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015129612A (ja) * 2014-01-08 2015-07-16 東京エレクトロン株式会社 熱交換システム及び同熱交換システムを有する基板処理装置

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