JPS6189410U - - Google Patents

Info

Publication number
JPS6189410U
JPS6189410U JP17551784U JP17551784U JPS6189410U JP S6189410 U JPS6189410 U JP S6189410U JP 17551784 U JP17551784 U JP 17551784U JP 17551784 U JP17551784 U JP 17551784U JP S6189410 U JPS6189410 U JP S6189410U
Authority
JP
Japan
Prior art keywords
face plate
sheet
suction
attached
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17551784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17551784U priority Critical patent/JPS6189410U/ja
Publication of JPS6189410U publication Critical patent/JPS6189410U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP17551784U 1984-11-19 1984-11-19 Pending JPS6189410U (US20020125480A1-20020912-P00900.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17551784U JPS6189410U (US20020125480A1-20020912-P00900.png) 1984-11-19 1984-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17551784U JPS6189410U (US20020125480A1-20020912-P00900.png) 1984-11-19 1984-11-19

Publications (1)

Publication Number Publication Date
JPS6189410U true JPS6189410U (US20020125480A1-20020912-P00900.png) 1986-06-11

Family

ID=30733118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17551784U Pending JPS6189410U (US20020125480A1-20020912-P00900.png) 1984-11-19 1984-11-19

Country Status (1)

Country Link
JP (1) JPS6189410U (US20020125480A1-20020912-P00900.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH068088A (ja) * 1992-06-30 1994-01-18 Shin Etsu Handotai Co Ltd ウエーハ研磨用固定板
JP2020015133A (ja) * 2018-07-25 2020-01-30 株式会社タカハシキカイ 真空チャック

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH068088A (ja) * 1992-06-30 1994-01-18 Shin Etsu Handotai Co Ltd ウエーハ研磨用固定板
JP2020015133A (ja) * 2018-07-25 2020-01-30 株式会社タカハシキカイ 真空チャック

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