JPS6187689U - - Google Patents

Info

Publication number

JPS6187689U

JPS6187689U JP17389784U JP17389784U JPS6187689U JP S6187689 U JPS6187689 U JP S6187689U JP 17389784 U JP17389784 U JP 17389784U JP 17389784 U JP17389784 U JP 17389784U JP S6187689 U JPS6187689 U JP S6187689U

Authority

JP

Japan

Prior art keywords

molybdenum

tungsten

cylindrical shape

diffusion bonding

bonding device

Prior art date

1984-11-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
• 238000009792 diffusion process Methods 0.000 claims 2
• 229910052750 molybdenum Inorganic materials 0.000 claims 2
• 239000011733 molybdenum Substances 0.000 claims 2
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
• 229910052721 tungsten Inorganic materials 0.000 claims 2
• 239000010937 tungsten Substances 0.000 claims 2
• 230000005611 electricity Effects 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 229910052715 tantalum Inorganic materials 0.000 claims 1
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1