JPS6186462U - - Google Patents

Info

Publication number
JPS6186462U
JPS6186462U JP17115984U JP17115984U JPS6186462U JP S6186462 U JPS6186462 U JP S6186462U JP 17115984 U JP17115984 U JP 17115984U JP 17115984 U JP17115984 U JP 17115984U JP S6186462 U JPS6186462 U JP S6186462U
Authority
JP
Japan
Prior art keywords
silicon wafer
parts
base
back side
bolt parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17115984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339257Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17115984U priority Critical patent/JPS6339257Y2/ja
Publication of JPS6186462U publication Critical patent/JPS6186462U/ja
Application granted granted Critical
Publication of JPS6339257Y2 publication Critical patent/JPS6339257Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP17115984U 1984-11-12 1984-11-12 Expired JPS6339257Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17115984U JPS6339257Y2 (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17115984U JPS6339257Y2 (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Publications (2)

Publication Number Publication Date
JPS6186462U true JPS6186462U (enrdf_load_stackoverflow) 1986-06-06
JPS6339257Y2 JPS6339257Y2 (enrdf_load_stackoverflow) 1988-10-14

Family

ID=30728854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17115984U Expired JPS6339257Y2 (enrdf_load_stackoverflow) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6339257Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6339257Y2 (enrdf_load_stackoverflow) 1988-10-14

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