JPS6186462U - - Google Patents
Info
- Publication number
- JPS6186462U JPS6186462U JP17115984U JP17115984U JPS6186462U JP S6186462 U JPS6186462 U JP S6186462U JP 17115984 U JP17115984 U JP 17115984U JP 17115984 U JP17115984 U JP 17115984U JP S6186462 U JPS6186462 U JP S6186462U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- parts
- base
- back side
- bolt parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115984U JPS6339257Y2 (cs) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115984U JPS6339257Y2 (cs) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186462U true JPS6186462U (cs) | 1986-06-06 |
| JPS6339257Y2 JPS6339257Y2 (cs) | 1988-10-14 |
Family
ID=30728854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17115984U Expired JPS6339257Y2 (cs) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339257Y2 (cs) |
-
1984
- 1984-11-12 JP JP17115984U patent/JPS6339257Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6339257Y2 (cs) | 1988-10-14 |