JPS6186460U - - Google Patents
Info
- Publication number
- JPS6186460U JPS6186460U JP16979484U JP16979484U JPS6186460U JP S6186460 U JPS6186460 U JP S6186460U JP 16979484 U JP16979484 U JP 16979484U JP 16979484 U JP16979484 U JP 16979484U JP S6186460 U JPS6186460 U JP S6186460U
- Authority
- JP
- Japan
- Prior art keywords
- reducing valve
- gas cylinder
- high pressure
- ion source
- pressure reducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16979484U JPS6186460U (id) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16979484U JPS6186460U (id) | 1984-11-08 | 1984-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6186460U true JPS6186460U (id) | 1986-06-06 |
Family
ID=30727510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16979484U Pending JPS6186460U (id) | 1984-11-08 | 1984-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6186460U (id) |
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1984
- 1984-11-08 JP JP16979484U patent/JPS6186460U/ja active Pending