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Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
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Filing date
Publication date
Application filed by Suwa Seikosha KKfiledCriticalSuwa Seikosha KK
Priority to JP16356080ApriorityCriticalpatent/JPS5787126A/ja
Publication of JPS5787126ApublicationCriticalpatent/JPS5787126A/ja
Publication of JPS618570B2publicationCriticalpatent/JPS618570B2/ja
H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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Engineering & Computer Science
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Physics & Mathematics
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Condensed Matter Physics & Semiconductors
(AREA)
General Physics & Mathematics
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Manufacturing & Machinery
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Computer Hardware Design
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Microelectronics & Electronic Packaging
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Power Engineering
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Electrodes Of Semiconductors
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Drying Of Semiconductors
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Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
JP16356080A1980-11-201980-11-20Manufacture of semiconductor device
GrantedJPS5787126A
(en)