JPS6185173U - - Google Patents

Info

Publication number
JPS6185173U
JPS6185173U JP16921884U JP16921884U JPS6185173U JP S6185173 U JPS6185173 U JP S6185173U JP 16921884 U JP16921884 U JP 16921884U JP 16921884 U JP16921884 U JP 16921884U JP S6185173 U JPS6185173 U JP S6185173U
Authority
JP
Japan
Prior art keywords
blower
discharge
electrodes
valve
mixed gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16921884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16921884U priority Critical patent/JPS6185173U/ja
Publication of JPS6185173U publication Critical patent/JPS6185173U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP16921884U 1984-11-09 1984-11-09 Pending JPS6185173U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16921884U JPS6185173U (enExample) 1984-11-09 1984-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16921884U JPS6185173U (enExample) 1984-11-09 1984-11-09

Publications (1)

Publication Number Publication Date
JPS6185173U true JPS6185173U (enExample) 1986-06-04

Family

ID=30726965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16921884U Pending JPS6185173U (enExample) 1984-11-09 1984-11-09

Country Status (1)

Country Link
JP (1) JPS6185173U (enExample)

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