JPS6185149U - - Google Patents
Info
- Publication number
- JPS6185149U JPS6185149U JP16853584U JP16853584U JPS6185149U JP S6185149 U JPS6185149 U JP S6185149U JP 16853584 U JP16853584 U JP 16853584U JP 16853584 U JP16853584 U JP 16853584U JP S6185149 U JPS6185149 U JP S6185149U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- platen
- guide
- fixing plate
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16853584U JPS6185149U (de) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16853584U JPS6185149U (de) | 1984-11-08 | 1984-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185149U true JPS6185149U (de) | 1986-06-04 |
Family
ID=30726303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16853584U Pending JPS6185149U (de) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185149U (de) |
-
1984
- 1984-11-08 JP JP16853584U patent/JPS6185149U/ja active Pending