JPS6185147U - - Google Patents
Info
- Publication number
- JPS6185147U JPS6185147U JP17016384U JP17016384U JPS6185147U JP S6185147 U JPS6185147 U JP S6185147U JP 17016384 U JP17016384 U JP 17016384U JP 17016384 U JP17016384 U JP 17016384U JP S6185147 U JPS6185147 U JP S6185147U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- fixes
- wafer stage
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000011156 evaluation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17016384U JPS6185147U (enExample) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17016384U JPS6185147U (enExample) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185147U true JPS6185147U (enExample) | 1986-06-04 |
Family
ID=30727870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17016384U Pending JPS6185147U (enExample) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185147U (enExample) |
-
1984
- 1984-11-09 JP JP17016384U patent/JPS6185147U/ja active Pending