JPS6185142U - - Google Patents
Info
- Publication number
- JPS6185142U JPS6185142U JP16853484U JP16853484U JPS6185142U JP S6185142 U JPS6185142 U JP S6185142U JP 16853484 U JP16853484 U JP 16853484U JP 16853484 U JP16853484 U JP 16853484U JP S6185142 U JPS6185142 U JP S6185142U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- rotating shaft
- rotating frame
- plate
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16853484U JPS6185142U (de) | 1984-11-08 | 1984-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16853484U JPS6185142U (de) | 1984-11-08 | 1984-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185142U true JPS6185142U (de) | 1986-06-04 |
Family
ID=30726302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16853484U Pending JPS6185142U (de) | 1984-11-08 | 1984-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185142U (de) |
-
1984
- 1984-11-08 JP JP16853484U patent/JPS6185142U/ja active Pending
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