JPS6184806U - - Google Patents

Info

Publication number

JPS6184806U

JPS6184806U JP16917584U JP16917584U JPS6184806U JP S6184806 U JPS6184806 U JP S6184806U JP 16917584 U JP16917584 U JP 16917584U JP 16917584 U JP16917584 U JP 16917584U JP S6184806 U JPS6184806 U JP S6184806U

Authority

JP

Japan

Prior art keywords

optical system

mask

utility

light

model registration

Prior art date

1984-11-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 7
• 238000010586 diagram Methods 0.000 description 1
• 230000004907 flux Effects 0.000 description 1
• 238000003384 imaging method Methods 0.000 description 1