JPS618383B2 - - Google Patents
Info
- Publication number
- JPS618383B2 JPS618383B2 JP419676A JP419676A JPS618383B2 JP S618383 B2 JPS618383 B2 JP S618383B2 JP 419676 A JP419676 A JP 419676A JP 419676 A JP419676 A JP 419676A JP S618383 B2 JPS618383 B2 JP S618383B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP419676A JPS5288085A (en) | 1976-01-17 | 1976-01-17 | Defect detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP419676A JPS5288085A (en) | 1976-01-17 | 1976-01-17 | Defect detection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5288085A JPS5288085A (en) | 1977-07-22 |
| JPS618383B2 true JPS618383B2 (en) | 1986-03-13 |
Family
ID=11577915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP419676A Granted JPS5288085A (en) | 1976-01-17 | 1976-01-17 | Defect detection system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5288085A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0319015Y2 (en) * | 1984-06-22 | 1991-04-22 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5643539A (en) * | 1979-09-19 | 1981-04-22 | Hitachi Ltd | Defect inspection device of face plate |
| DE3043849A1 (en) * | 1980-11-21 | 1982-07-08 | Koninklijke Textielfabrieken Nijverdal-Ten Gate N.V., Almelo | METHOD FOR VIEWING A REFLECTIVE AND / OR TRANSPARENT, MOVING TRAIN AND FOAMING MACHINE FOR CARRYING OUT THE METHOD |
| JPH0612753B2 (en) * | 1983-12-26 | 1994-02-16 | 株式会社日立製作所 | Pattern detection method and apparatus thereof |
| JPH02189447A (en) * | 1989-01-18 | 1990-07-25 | Nippon Columbia Co Ltd | Inspecting method of defect of substrate surface and illuminating device |
| JP4391082B2 (en) | 2002-12-20 | 2009-12-24 | 株式会社トプコン | Surface inspection method and apparatus |
-
1976
- 1976-01-17 JP JP419676A patent/JPS5288085A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0319015Y2 (en) * | 1984-06-22 | 1991-04-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5288085A (en) | 1977-07-22 |