JPS6183029U - - Google Patents
Info
- Publication number
- JPS6183029U JPS6183029U JP16832784U JP16832784U JPS6183029U JP S6183029 U JPS6183029 U JP S6183029U JP 16832784 U JP16832784 U JP 16832784U JP 16832784 U JP16832784 U JP 16832784U JP S6183029 U JPS6183029 U JP S6183029U
- Authority
- JP
- Japan
- Prior art keywords
- irradiator
- vapor phase
- phase growth
- reactant gas
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 239000000376 reactant Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832784U JPS6183029U (en, 2012) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16832784U JPS6183029U (en, 2012) | 1984-11-06 | 1984-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183029U true JPS6183029U (en, 2012) | 1986-06-02 |
Family
ID=30726103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16832784U Pending JPS6183029U (en, 2012) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183029U (en, 2012) |
-
1984
- 1984-11-06 JP JP16832784U patent/JPS6183029U/ja active Pending