JPS6182957U - - Google Patents
Info
- Publication number
- JPS6182957U JPS6182957U JP16653084U JP16653084U JPS6182957U JP S6182957 U JPS6182957 U JP S6182957U JP 16653084 U JP16653084 U JP 16653084U JP 16653084 U JP16653084 U JP 16653084U JP S6182957 U JPS6182957 U JP S6182957U
- Authority
- JP
- Japan
- Prior art keywords
- groove portion
- base material
- reaction chamber
- axial direction
- tube body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000000376 reactant Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653084U JPS6182957U (zh) | 1984-11-02 | 1984-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653084U JPS6182957U (zh) | 1984-11-02 | 1984-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6182957U true JPS6182957U (zh) | 1986-06-02 |
Family
ID=30724339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16653084U Pending JPS6182957U (zh) | 1984-11-02 | 1984-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6182957U (zh) |
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1984
- 1984-11-02 JP JP16653084U patent/JPS6182957U/ja active Pending