JPS6182082U - - Google Patents
Info
- Publication number
- JPS6182082U JPS6182082U JP16566584U JP16566584U JPS6182082U JP S6182082 U JPS6182082 U JP S6182082U JP 16566584 U JP16566584 U JP 16566584U JP 16566584 U JP16566584 U JP 16566584U JP S6182082 U JPS6182082 U JP S6182082U
- Authority
- JP
- Japan
- Prior art keywords
- pull rod
- fork part
- spacer
- piston
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16566584U JPS6182082U (bg) | 1984-11-02 | 1984-11-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16566584U JPS6182082U (bg) | 1984-11-02 | 1984-11-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6182082U true JPS6182082U (bg) | 1986-05-30 |
Family
ID=30723505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16566584U Pending JPS6182082U (bg) | 1984-11-02 | 1984-11-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6182082U (bg) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210097643A (ko) | 2020-01-29 | 2021-08-09 | 엔지케이 인슐레이터 엘티디 | 치밀질 복합 재료, 그 제법, 접합체 및 반도체 제조 장치용 부재 |
-
1984
- 1984-11-02 JP JP16566584U patent/JPS6182082U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210097643A (ko) | 2020-01-29 | 2021-08-09 | 엔지케이 인슐레이터 엘티디 | 치밀질 복합 재료, 그 제법, 접합체 및 반도체 제조 장치용 부재 |