JPS6181684A - Gas laser oscillator - Google Patents

Gas laser oscillator

Info

Publication number
JPS6181684A
JPS6181684A JP20320984A JP20320984A JPS6181684A JP S6181684 A JPS6181684 A JP S6181684A JP 20320984 A JP20320984 A JP 20320984A JP 20320984 A JP20320984 A JP 20320984A JP S6181684 A JPS6181684 A JP S6181684A
Authority
JP
Japan
Prior art keywords
plate
mirror holder
mirror
holder
gas laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20320984A
Other languages
Japanese (ja)
Inventor
Yoshio Nakazawa
中沢 芳男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20320984A priority Critical patent/JPS6181684A/en
Publication of JPS6181684A publication Critical patent/JPS6181684A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/086One or more reflectors having variable properties or positions for initial adjustment of the resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To prevent displacement in the vertical and horizontal directions of mirror due to vibration or impact by fixing the relative positional relation in the vertical direction to the axis located between a mirror holder and plate of resonator frame with a plate spring. CONSTITUTION:A plate spring 10 made of stainless steel fitted between a plate 3 and a mirror holder 5 is fixed through a fixing bases 11 and 12 made of aluminum to the plate 3 and mirror holder 5. The plate spring 10 can be freely displaced in the direction of laser axis and therefore there is no trouble on the alignment of mirror holder. Meanwhile, since the plate spring 10 is fixed to the plate 3 and mirror holder 5 through the fixing bases 11 and 12, the mutual positional relation between the plate and holder is not changed even when vibration or impact is applied in the vertical or horizontal direction.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はガスレーザ発振器、特にそのミラーホルダの取
シ付は構造に関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a gas laser oscillator, and particularly to the structure of mounting a mirror holder thereon.

(従来の技術) ガスレーザ発振器は、第2図にその一部分が示されてい
るようにガスレーザ管1と、このレーザ管のまわシに複
数本のインバー等でできたロッド2を配置しこれらロッ
ド2を所定の間隔を保つようにプレート3で固定に形成
した共振器枠と、この共振器枠のロッドの両端部に皿バ
ネ8を介して取シ付けられたミラーホルダ5と、ミラー
ホルダ5に固着されたレーザ共振器を構成するミ2−6
とを含んでいる。ミラー6のアラインメント、すなわち
ミラーホルダの72インメ/トは第2図かられかるより
に共振器枠のロッド2の先端部に設けた皿バネ80弾性
力とナツト9の押圧力とによりて行なっている。なお4
はプレート3をロッド2に固定するナツト、7は皿バネ
8を保持するナツトである。
(Prior Art) A gas laser oscillator, as partially shown in FIG. 2, includes a gas laser tube 1 and a plurality of rods 2 made of invar or the like arranged around the laser tube. A resonator frame is fixedly formed with a plate 3 so as to maintain a predetermined interval between the resonator frames, a mirror holder 5 is attached to both ends of the rod of the resonator frame via disc springs 8, and a mirror holder 5 is attached to the mirror holder 5. Mi2-6 constituting a fixed laser resonator
Contains. The alignment of the mirror 6, that is, the 72-inch position of the mirror holder, is achieved by the elastic force of a disc spring 80 provided at the tip of the rod 2 of the resonator frame and the pressing force of the nut 9, as shown in FIG. There is. Note 4
7 is a nut that fixes the plate 3 to the rod 2, and 7 is a nut that holds the disc spring 8.

(発明が解決しようとする問題点) このような従来のミラーホルダの共振器枠への取シ付は
方法は、ミラーホルダの72インメント全容易くするた
め皿バネ8t−介して行なっているため堅固な保持とな
らず、上下、左方方向に振動または衝撃が加わった場合
、ミラーホルダ即ち光共振器用ミ2−が変位し、ミ2−
のアライメントがすべてレーザ出力が変化してしまうと
いう欠点があった。
(Problem to be Solved by the Invention) The conventional method for attaching the mirror holder to the resonator frame is through an 8-t disc spring to make the 72-instance of the mirror holder easy. If the mirror holder, that is, the optical resonator mirror 2-, is not held properly and vibration or impact is applied in the vertical or leftward direction, the mirror holder, that is, the mirror holder for the optical resonator 2-, will be displaced, and the mirror holder 2-
The drawback is that the laser output changes depending on the alignment.

本発明の目的は、上述の欠点を除去し、耐振動耐衝撃性
にすぐれ安定に動作するガスレーザ発振器を提供するこ
とである。
An object of the present invention is to eliminate the above-mentioned drawbacks and provide a gas laser oscillator that has excellent vibration and shock resistance and operates stably.

(問題点を解決するための手段) 本発明は、ガスレーザ管と、このレーザ管のまわりに配
置され九複数本のロッドとこれらロッドを所定間隔に固
定するプレートとから成る共振器枠と、この共振器枠の
両端部に設けられたミツ−ホルダと、このミラーホルダ
に取付けたミラーとを有するガスレーザ発振器において
、ミラーホルダと共振器のプレートとの間に一端をミツ
−ホルダに固定され、他端をグレートに固定された板バ
ネを設けたことを特徴とする。
(Means for Solving the Problems) The present invention provides a resonator frame consisting of a gas laser tube, a plurality of nine rods arranged around the laser tube, and a plate for fixing these rods at predetermined intervals. In a gas laser oscillator that has a Mitsu holder provided at both ends of a resonator frame and a mirror attached to the mirror holder, one end is fixed to the Mitsu holder between the mirror holder and the plate of the resonator, and the other is fixed to the Mitsu holder. It is characterized by a leaf spring whose end is fixed to the grate.

(実施例) 次に図面を用いて本発明を説明するO 第1図(al 、 (blは本発明の一実施例の概略図
であり、10は、プレート3とミラーホルタ゛5間に取
り付けられたステンレス等でできた板〕くネでプレート
3及びミラーホルダ5へはAj等でできた固定台11お
よび12を介して固定されている。板バネ10は、レー
ザ軸方向には自白に変位できるのでミラーホルダのアラ
インメントには支障はない。一方、板バネ10はプレー
ト3とミラーホルダ5に固定台11および12t−介し
て固定されているので軸に垂直な上下、左右方向に振動
または衝撃が加わった場合にプレートとミラーホルダの
相互位置関係は変わらない。従ってミラーホルタ゛すな
わち光共振器用ミ2−の変位は起こらず、レーザ出力の
変動が抑えられるという利点を有する。
(Example) Next, the present invention will be explained using the drawings. The plate 3 and mirror holder 5 are fixed to the plate 3 and the mirror holder 5 with screws via fixing bases 11 and 12 made of Aj, etc. The plate spring 10 is displaced in the direction of the laser axis. On the other hand, since the leaf spring 10 is fixed to the plate 3 and the mirror holder 5 via the fixing bases 11 and 12t, there is no vibration or impact in the vertical and horizontal directions perpendicular to the axis. The mutual positional relationship between the plate and the mirror holder does not change when the mirror holder is applied.Therefore, the mirror holder, that is, the optical resonator mirror 2- is not displaced, and there is an advantage that fluctuations in the laser output can be suppressed.

(発明の効果) 以上説明したように、本発明はミラーホルダと共振器枠
のプレート間の軸に垂直な方向の相互位置関係を板バネ
によシ固定しているのでミラーのアラインメントに支障
を与えずに振動又は衝撃による光共振器用ミラーの上下
、左右方向の変位を防止でさ、耐振性及び耐衝撃性に優
れたガスレーザ発振器を得ることができる。
(Effects of the Invention) As explained above, in the present invention, the mutual positional relationship in the direction perpendicular to the axis between the mirror holder and the plate of the resonator frame is fixed by the leaf spring, so there is no problem in mirror alignment. A gas laser oscillator with excellent vibration resistance and impact resistance can be obtained by preventing vertical and horizontal displacement of the optical resonator mirror due to vibration or impact.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(al 、 (hlは本発明の一実施例の概略図
で、(a)図は側面図、(b)図は正面図、第2図は従
来のガスレーザ発振器のミツ−ホルダの取シ付は構造の
一例を示す概略図である。 1・・・レーザ管、2・・・ロッド、3・・・プレート
、4・ナツト、5・・・ミラーホルダ、6・・ミラー、
7・・・ナツト、8・・・皿バネ、9・・・アラインメ
ント用ナツト、10・・・板バネ、11.12・板バネ
の固定台。 (σ)                 (b)第 
/ 硼 ブL−トJ 第 2 図
Figures 1 (al and hl) are schematic diagrams of one embodiment of the present invention, (a) is a side view, (b) is a front view, and Figure 2 is an installation of a conventional gas laser oscillator holder. 1 is a schematic diagram showing an example of the structure. 1... Laser tube, 2... Rod, 3... Plate, 4... Nut, 5... Mirror holder, 6... Mirror,
7... Nut, 8... Belleville spring, 9... Nut for alignment, 10... Leaf spring, 11.12. Fixing base for leaf spring. (σ) (b)th
/ Figure 2

Claims (1)

【特許請求の範囲】[Claims] ガスレーザ管と、このレーザ管のまわりに配置された複
数本のロッドとこれらロッドを所定間隔に固定するプレ
ートとより成る共振器枠と、この共振器枠の両端に設け
られた光共振器用ミラーを保持するためのミラーホルダ
ーと、このミラーホルダーに取付けたミラーとを有する
ガスレーザ発振器において、前記ミラーホルダーと共振
器枠のプレートとの間に両端をミラーホルダーとプレー
トに固定した板バネを設けたことを特徴とするガスレー
ザ発振器。
A resonator frame consisting of a gas laser tube, a plurality of rods arranged around the laser tube, and a plate that fixes these rods at predetermined intervals, and optical resonator mirrors provided at both ends of the resonator frame. In a gas laser oscillator having a mirror holder for holding and a mirror attached to the mirror holder, a plate spring having both ends fixed to the mirror holder and the plate is provided between the mirror holder and the plate of the resonator frame. A gas laser oscillator featuring:
JP20320984A 1984-09-28 1984-09-28 Gas laser oscillator Pending JPS6181684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20320984A JPS6181684A (en) 1984-09-28 1984-09-28 Gas laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20320984A JPS6181684A (en) 1984-09-28 1984-09-28 Gas laser oscillator

Publications (1)

Publication Number Publication Date
JPS6181684A true JPS6181684A (en) 1986-04-25

Family

ID=16470269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20320984A Pending JPS6181684A (en) 1984-09-28 1984-09-28 Gas laser oscillator

Country Status (1)

Country Link
JP (1) JPS6181684A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457990A (en) * 1977-10-18 1979-05-10 Toshiba Corp Laser resonator
JPS5752918A (en) * 1980-09-09 1982-03-29 Toyota Motor Corp Constant-speed running device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457990A (en) * 1977-10-18 1979-05-10 Toshiba Corp Laser resonator
JPS5752918A (en) * 1980-09-09 1982-03-29 Toyota Motor Corp Constant-speed running device

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