JPS6180294U - - Google Patents
Info
- Publication number
- JPS6180294U JPS6180294U JP16537084U JP16537084U JPS6180294U JP S6180294 U JPS6180294 U JP S6180294U JP 16537084 U JP16537084 U JP 16537084U JP 16537084 U JP16537084 U JP 16537084U JP S6180294 U JPS6180294 U JP S6180294U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- liquid level
- water tank
- chamber
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16537084U JPS6180294U (it) | 1984-10-31 | 1984-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16537084U JPS6180294U (it) | 1984-10-31 | 1984-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6180294U true JPS6180294U (it) | 1986-05-28 |
Family
ID=30723221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16537084U Pending JPS6180294U (it) | 1984-10-31 | 1984-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6180294U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006335449A (ja) * | 2005-06-03 | 2006-12-14 | Nomura Micro Sci Co Ltd | 超純水貯槽 |
-
1984
- 1984-10-31 JP JP16537084U patent/JPS6180294U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006335449A (ja) * | 2005-06-03 | 2006-12-14 | Nomura Micro Sci Co Ltd | 超純水貯槽 |