JPS6179696U - - Google Patents
Info
- Publication number
- JPS6179696U JPS6179696U JP16498884U JP16498884U JPS6179696U JP S6179696 U JPS6179696 U JP S6179696U JP 16498884 U JP16498884 U JP 16498884U JP 16498884 U JP16498884 U JP 16498884U JP S6179696 U JPS6179696 U JP S6179696U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- exhaust
- exhaust pipe
- opening
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16498884U JPS6179696U (enExample) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16498884U JPS6179696U (enExample) | 1984-10-30 | 1984-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6179696U true JPS6179696U (enExample) | 1986-05-27 |
Family
ID=30722851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16498884U Pending JPS6179696U (enExample) | 1984-10-30 | 1984-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6179696U (enExample) |
-
1984
- 1984-10-30 JP JP16498884U patent/JPS6179696U/ja active Pending