JPS6178871U - - Google Patents
Info
- Publication number
- JPS6178871U JPS6178871U JP15981184U JP15981184U JPS6178871U JP S6178871 U JPS6178871 U JP S6178871U JP 15981184 U JP15981184 U JP 15981184U JP 15981184 U JP15981184 U JP 15981184U JP S6178871 U JPS6178871 U JP S6178871U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- molecular
- bellows
- beam source
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15981184U JPS6178871U (fr) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15981184U JPS6178871U (fr) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178871U true JPS6178871U (fr) | 1986-05-26 |
Family
ID=30717757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15981184U Pending JPS6178871U (fr) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178871U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281482A (ja) * | 1986-05-14 | 1987-12-07 | ボ−ル、コ−パレイシヤン | 解離装置 |
-
1984
- 1984-10-24 JP JP15981184U patent/JPS6178871U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281482A (ja) * | 1986-05-14 | 1987-12-07 | ボ−ル、コ−パレイシヤン | 解離装置 |