JPS6178596U - - Google Patents

Info

Publication number
JPS6178596U
JPS6178596U JP16473184U JP16473184U JPS6178596U JP S6178596 U JPS6178596 U JP S6178596U JP 16473184 U JP16473184 U JP 16473184U JP 16473184 U JP16473184 U JP 16473184U JP S6178596 U JPS6178596 U JP S6178596U
Authority
JP
Japan
Prior art keywords
base
suction pad
suction
outer peripheral
air passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16473184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16473184U priority Critical patent/JPS6178596U/ja
Publication of JPS6178596U publication Critical patent/JPS6178596U/ja
Pending legal-status Critical Current

Links

JP16473184U 1984-10-31 1984-10-31 Pending JPS6178596U (US20070167544A1-20070719-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16473184U JPS6178596U (US20070167544A1-20070719-C00007.png) 1984-10-31 1984-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16473184U JPS6178596U (US20070167544A1-20070719-C00007.png) 1984-10-31 1984-10-31

Publications (1)

Publication Number Publication Date
JPS6178596U true JPS6178596U (US20070167544A1-20070719-C00007.png) 1986-05-26

Family

ID=30722595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16473184U Pending JPS6178596U (US20070167544A1-20070719-C00007.png) 1984-10-31 1984-10-31

Country Status (1)

Country Link
JP (1) JPS6178596U (US20070167544A1-20070719-C00007.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645752A (en) * 1987-06-30 1989-01-10 Tokyo Electron Ltd Suction arm

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645752A (en) * 1987-06-30 1989-01-10 Tokyo Electron Ltd Suction arm

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