JPS6176959U - - Google Patents

Info

Publication number
JPS6176959U
JPS6176959U JP16276384U JP16276384U JPS6176959U JP S6176959 U JPS6176959 U JP S6176959U JP 16276384 U JP16276384 U JP 16276384U JP 16276384 U JP16276384 U JP 16276384U JP S6176959 U JPS6176959 U JP S6176959U
Authority
JP
Japan
Prior art keywords
wafer
cassette holder
raise
vertical plane
base part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16276384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16276384U priority Critical patent/JPS6176959U/ja
Publication of JPS6176959U publication Critical patent/JPS6176959U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP16276384U 1984-10-26 1984-10-26 Pending JPS6176959U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16276384U JPS6176959U (US07534539-20090519-C00280.png) 1984-10-26 1984-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16276384U JPS6176959U (US07534539-20090519-C00280.png) 1984-10-26 1984-10-26

Publications (1)

Publication Number Publication Date
JPS6176959U true JPS6176959U (US07534539-20090519-C00280.png) 1986-05-23

Family

ID=30720635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16276384U Pending JPS6176959U (US07534539-20090519-C00280.png) 1984-10-26 1984-10-26

Country Status (1)

Country Link
JP (1) JPS6176959U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (ja) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 ウェーハ容器傾け台

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650344U (ja) * 1991-02-07 1994-07-08 コマツ電子金属株式会社 ウェーハ容器傾け台

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