JPS6176174U - - Google Patents
Info
- Publication number
- JPS6176174U JPS6176174U JP16103784U JP16103784U JPS6176174U JP S6176174 U JPS6176174 U JP S6176174U JP 16103784 U JP16103784 U JP 16103784U JP 16103784 U JP16103784 U JP 16103784U JP S6176174 U JPS6176174 U JP S6176174U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- cryopanel
- cryopump
- heat shield
- shield plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は従来のクライオポンプの概略を示す断
面図、第２図はその正面図、第３図はその側面図
、第４図は本考案のクライオポンプの一実施例を
示す断面図である。
１…クライオパネル、２…枠、３…熱シールド
板、４…シエプロン型バツフル、５，６…液体窒
素循環パイプ、７…当板、８…ベンド部。
FIG. 1 is a sectional view schematically showing a conventional cryopump, FIG. 2 is a front view thereof, FIG. 3 is a side view thereof, and FIG. 4 is a sectional view showing an embodiment of the cryopump of the present invention. . DESCRIPTION OF SYMBOLS 1...Cryopanel, 2...Frame, 3...Heat shield plate, 4...Siepron-type buttful, 5, 6...Liquid nitrogen circulation pipe, 7...Packing plate, 8...Bend part.
Claims (1)
る枠と、該枠の一方側で支持される熱シールド板
と枠の他方側で支持されるロン型バツフルとより
成るクライオポンプにおいて、前記熱シールド板
にベンド部を設けた事を特徴とするクライオポン
プ。 In a cryopump consisting of a cryopanel, a frame supporting the cryopanel, a heat shield plate supported on one side of the frame, and a round shaped buttful supported on the other side of the frame, the heat shield plate is bent. A cryopump characterized by having a section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16103784U JPS6176174U (en) | 1984-10-26 | 1984-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16103784U JPS6176174U (en) | 1984-10-26 | 1984-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176174U true JPS6176174U (en) | 1986-05-22 |
Family
ID=30718950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16103784U Pending JPS6176174U (en) | 1984-10-26 | 1984-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176174U (en) |
-
1984
- 1984-10-26 JP JP16103784U patent/JPS6176174U/ja active Pending
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