JPS6176174U - - Google Patents

Info

Publication number
JPS6176174U
JPS6176174U JP16103784U JP16103784U JPS6176174U JP S6176174 U JPS6176174 U JP S6176174U JP 16103784 U JP16103784 U JP 16103784U JP 16103784 U JP16103784 U JP 16103784U JP S6176174 U JPS6176174 U JP S6176174U
Authority
JP
Japan
Prior art keywords
frame
cryopanel
cryopump
heat shield
shield plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16103784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16103784U priority Critical patent/JPS6176174U/ja
Publication of JPS6176174U publication Critical patent/JPS6176174U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP16103784U 1984-10-26 1984-10-26 Pending JPS6176174U (US20030220297A1-20031127-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16103784U JPS6176174U (US20030220297A1-20031127-C00033.png) 1984-10-26 1984-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16103784U JPS6176174U (US20030220297A1-20031127-C00033.png) 1984-10-26 1984-10-26

Publications (1)

Publication Number Publication Date
JPS6176174U true JPS6176174U (US20030220297A1-20031127-C00033.png) 1986-05-22

Family

ID=30718950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16103784U Pending JPS6176174U (US20030220297A1-20031127-C00033.png) 1984-10-26 1984-10-26

Country Status (1)

Country Link
JP (1) JPS6176174U (US20030220297A1-20031127-C00033.png)

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