JPS6175873U - - Google Patents
Info
- Publication number
- JPS6175873U JPS6175873U JP16023284U JP16023284U JPS6175873U JP S6175873 U JPS6175873 U JP S6175873U JP 16023284 U JP16023284 U JP 16023284U JP 16023284 U JP16023284 U JP 16023284U JP S6175873 U JPS6175873 U JP S6175873U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- chamber
- inlet
- vapor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011550 stock solution Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16023284U JPS646943Y2 (https=) | 1984-10-23 | 1984-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16023284U JPS646943Y2 (https=) | 1984-10-23 | 1984-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6175873U true JPS6175873U (https=) | 1986-05-22 |
| JPS646943Y2 JPS646943Y2 (https=) | 1989-02-23 |
Family
ID=30718157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16023284U Expired JPS646943Y2 (https=) | 1984-10-23 | 1984-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646943Y2 (https=) |
-
1984
- 1984-10-23 JP JP16023284U patent/JPS646943Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646943Y2 (https=) | 1989-02-23 |