JPS6175831U - - Google Patents
Info
- Publication number
- JPS6175831U JPS6175831U JP15796084U JP15796084U JPS6175831U JP S6175831 U JPS6175831 U JP S6175831U JP 15796084 U JP15796084 U JP 15796084U JP 15796084 U JP15796084 U JP 15796084U JP S6175831 U JPS6175831 U JP S6175831U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- heating
- high vacuum
- sample
- source chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000012856 packing Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15796084U JPS6246431Y2 (enExample) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15796084U JPS6246431Y2 (enExample) | 1984-10-19 | 1984-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6175831U true JPS6175831U (enExample) | 1986-05-22 |
| JPS6246431Y2 JPS6246431Y2 (enExample) | 1987-12-15 |
Family
ID=30715947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15796084U Expired JPS6246431Y2 (enExample) | 1984-10-19 | 1984-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6246431Y2 (enExample) |
-
1984
- 1984-10-19 JP JP15796084U patent/JPS6246431Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6246431Y2 (enExample) | 1987-12-15 |
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