JPS6175125U - - Google Patents
Info
- Publication number
- JPS6175125U JPS6175125U JP1984159804U JP15980484U JPS6175125U JP S6175125 U JPS6175125 U JP S6175125U JP 1984159804 U JP1984159804 U JP 1984159804U JP 15980484 U JP15980484 U JP 15980484U JP S6175125 U JPS6175125 U JP S6175125U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- view
- sectional
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984159804U JPS6175125U (enExample) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984159804U JPS6175125U (enExample) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175125U true JPS6175125U (enExample) | 1986-05-21 |
Family
ID=30717750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984159804U Pending JPS6175125U (enExample) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175125U (enExample) |
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1984
- 1984-10-24 JP JP1984159804U patent/JPS6175125U/ja active Pending