JPS6175125U - - Google Patents
Info
- Publication number
- JPS6175125U JPS6175125U JP15980484U JP15980484U JPS6175125U JP S6175125 U JPS6175125 U JP S6175125U JP 15980484 U JP15980484 U JP 15980484U JP 15980484 U JP15980484 U JP 15980484U JP S6175125 U JPS6175125 U JP S6175125U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- view
- sectional
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15980484U JPS6175125U (en:Method) | 1984-10-24 | 1984-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15980484U JPS6175125U (en:Method) | 1984-10-24 | 1984-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6175125U true JPS6175125U (en:Method) | 1986-05-21 |
Family
ID=30717750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15980484U Pending JPS6175125U (en:Method) | 1984-10-24 | 1984-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6175125U (en:Method) |
-
1984
- 1984-10-24 JP JP15980484U patent/JPS6175125U/ja active Pending