JPS6174409A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPS6174409A
JPS6174409A JP19715784A JP19715784A JPS6174409A JP S6174409 A JPS6174409 A JP S6174409A JP 19715784 A JP19715784 A JP 19715784A JP 19715784 A JP19715784 A JP 19715784A JP S6174409 A JPS6174409 A JP S6174409A
Authority
JP
Japan
Prior art keywords
electrode
surface acoustic
acoustic wave
dummy
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19715784A
Other languages
Japanese (ja)
Inventor
Osamu Yamazaki
山崎 攻
Kentaro Setsune
瀬恒 謙太郎
Teruhiro Shiono
照弘 塩野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19715784A priority Critical patent/JPS6174409A/en
Publication of JPS6174409A publication Critical patent/JPS6174409A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a surface acoustic wave excellent in characteristic by selecting a center distance of interdigital electrodes of dummy electrodes as lambda0/2j(lambda0 is the wavelength of a surface acoustic wave at the center frequency) and the center distance between the closest electrode fingers of the dummy electrode and the input/output blocks as lambda0/4. CONSTITUTION:The electrode finger number of the block of input and output electrode fiber blocks and of the dummy electrodes is selected as, e.g., four. Then the distance (d) of the closest electrode fingers between the dummy electrode and the input/output block is selected as, e.g., 3/4lambda0, where lambda0 is the wavelength of a surface acoustic wave at the center frequency of the surface acoustic wave device. The line width and interval of the electrode fingers of the input/ output/dummy electrodes are selected all as 1/4lambda0. Through the setting above, a surface acoustic wave stimulated from the input electrode 21 passes through the dummy electrode 25 and reaches the output comb electrode 23 and since the phase of the reflected wave of the electrodes 25, 21 is inverted, they are cancelled and reflection is eliminated. Further, in using the dummy electrode as a common ground electrode 26, the grounding is unified effectively.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は弾性表面波装置に関し、二次効果の影響のすく
ない特性の良好な弾性表面波装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a surface acoustic wave device, and more particularly to a surface acoustic wave device with good characteristics that are less susceptible to secondary effects.

従来例の構成とその問題点 弾性表面波を用いた装置は通常圧電性材料からなる基板
上に、入力側と出力側の櫛型電極変換器を設け、入力側
の上記変換器で励起した弾性表面波が出力側の上記変換
器へ伝搬し、出力側の変換器で再び電気信号として検出
することにより構成される。この際、櫛型電極変換器の
電極指のピッチや本数、入力、出力の変換器の間の距離
の設計により、弾性表面波装置の中心周波数、帯域、遅
延時間を設定できる。しかし、電極指の二次効果により
、電極指の所で、弾性表面波の反射がおこり、しばしば
所望の特性を実現することが困難であった。この種の問
題は、電極指の厚さが弾性表面波の波長に比べて無視で
きなくなる高周波用の装置で著しく、電極指の数の多い
狭帯域の装置で影響が大きい。また高周波領域では弾性
表面波の伝搬損失が大きくなるため、狭帯域の装置では
電極指の数が増し、入出力の櫛型電極変換器間の距離が
遠くなり、伝搬損失か増大するという問題かあった。こ
の伝搬損失の増大を防止するために、入力の櫛型電極変
換器の電極指をまびき、その部分に出力の櫛型電極変換
器を設けた第1図に示す構造が考えられたが、電極指の
反射か大きく、全体かひとつの弾性表面波共振器となっ
てしまうため、周波数特性などの設計の自由度がすくな
く、所望の特性を実現することは困難であった。
Conventional structure and its problems Devices using surface acoustic waves usually have comb-shaped electrode transducers on the input side and output side on a substrate made of piezoelectric material, and generate elastic waves excited by the transducer on the input side. The surface wave propagates to the above-mentioned converter on the output side, and is detected again as an electric signal by the converter on the output side. At this time, the center frequency, band, and delay time of the surface acoustic wave device can be set by designing the pitch and number of electrode fingers of the comb-shaped electrode transducer, and the distance between the input and output transducers. However, due to the secondary effect of the electrode fingers, surface acoustic waves are reflected at the electrode fingers, making it often difficult to achieve desired characteristics. This type of problem is most noticeable in high-frequency devices where the thickness of the electrode fingers cannot be ignored compared to the wavelength of the surface acoustic wave, and has a large effect on narrow-band devices with a large number of electrode fingers. In addition, since the propagation loss of surface acoustic waves increases in the high frequency region, the number of electrode fingers increases in narrowband devices, and the distance between the input and output comb-shaped electrode transducers becomes longer, resulting in an increase in propagation loss. there were. In order to prevent this increase in propagation loss, the structure shown in Fig. 1 was considered, in which the electrode fingers of the input comb-shaped electrode transducer were twisted around, and the output comb-shaped electrode transducer was installed in that area. Since the reflection from the fingers is large and the entire device becomes a single surface acoustic wave resonator, there is little freedom in design such as frequency characteristics, making it difficult to achieve desired characteristics.

発明の目的 本発明はこのような従来における問題点を除去した新規
な弾性表面波装置を提供することを目的とするものであ
り、以下図面とともに説明する。
OBJECTS OF THE INVENTION An object of the present invention is to provide a novel surface acoustic wave device that eliminates such conventional problems, and will be explained below with reference to the drawings.

発明の構成 本発明は入力側および出力側の櫛型電極変換器をそれぞ
れ複数個のブロックに分割した間引き型の構造とし、入
力側の櫛型電極変換器の間引いた位置に出力側の電極指
のブロックを配置して構成される。この際互いに隣接す
る入力側および出力側のブロックの電極指数をほぼ等し
くするとともに、それらの間に上記の電極指数とほぼ等
しい本数のダミー電極を配置し、ダミー電極の電極指と
上記の入力側および出力側の最も近接する電極指の中心
間距離を、当該弾性表面波装置の中心周波ることで実現
される。ここでnは整数とする。
Structure of the Invention The present invention has a thinned-out structure in which the input-side and output-side comb-shaped electrode transducers are each divided into a plurality of blocks, and the output-side electrode fingers are arranged at the thinned-out positions of the input-side comb-shaped electrode transducers. It is constructed by arranging blocks. At this time, the electrode index of the blocks on the input side and the output side that are adjacent to each other is made approximately equal, and dummy electrodes with a number approximately equal to the above electrode index are placed between them, and the electrode fingers of the dummy electrode and the input side This is realized by setting the center-to-center distance of the closest electrode fingers on the output side to the center frequency of the surface acoustic wave device. Here, n is an integer.

実施例の説明 次に本発明の一実施について説明する。まず従来例にお
ける構造との差異を明確にするため、第1図の従来例と
対比させて第2図の本発明の詳細な説明する。
DESCRIPTION OF EMBODIMENTS Next, one implementation of the present invention will be described. First, in order to clarify the difference between the structure and the conventional example, the present invention shown in FIG. 2 will be explained in detail in comparison with the conventional example shown in FIG.

第1図は従来の弾性表面波装置の構造を示す概要図であ
って、圧電性の基板11に構成された入力側の櫛型電極
変換器12(図では黒塗りで示した)は複数個のブロッ
クに分割されている。ここでは各ブロックは2対すなわ
ち4本ずつ電極指から構成されている。入力側の各ブロ
ックの電極はまとめて入力端子14に接続され、もう一
方の端子15は接地する。出力側の櫛型電極変換器13
も(ここでは白抜きで示した)、同様に複数個のブロッ
クに分割し、入力側のブロックの間に挿入して設け、出
力端子16から電気信号をとりだしていた。出力側のも
う一方の端子17は接地する。
FIG. 1 is a schematic diagram showing the structure of a conventional surface acoustic wave device, in which a plurality of comb-shaped electrode transducers 12 (indicated in black in the figure) on the input side are constructed on a piezoelectric substrate 11. It is divided into blocks. Here, each block is composed of two pairs, that is, four electrode fingers. The electrodes of each block on the input side are collectively connected to an input terminal 14, and the other terminal 15 is grounded. Comb type electrode converter 13 on the output side
(shown in white here) was similarly divided into a plurality of blocks, inserted between blocks on the input side, and an electrical signal was taken out from the output terminal 16. The other terminal 17 on the output side is grounded.

従来は全体の電極指数が増すと、電極指の端部での音響
インピーダンスの不 続性による反射や、圧電効果によ
る電気的再励撮などのいわゆる二次効果がおこり、特性
を悪くしていた。本発明によれば、かかる二次効果を効
果的に除去し、高性能の弾性表面波を実現できる。
Conventionally, as the overall electrode index increased, so-called secondary effects such as reflection due to discontinuity of acoustic impedance at the end of the electrode fingers and electrical re-excitation due to the piezoelectric effect occurred, worsening the characteristics. . According to the present invention, such secondary effects can be effectively removed and high-performance surface acoustic waves can be realized.

第2図は本発明の一実施例を示す概略図である。FIG. 2 is a schematic diagram showing an embodiment of the present invention.

ここでは入力側、出力側の各電極指のブロック、および
、その間に配置したダミー電極の電極指数をすべて4本
としている。これらは完全に同数でなくとも、はぼ同数
であれば良い。ダミー電極と入力側、出力側のブロック
との最近接電極指間の距離dはここでは%λ0とした。
Here, the number of electrode fingers in each block of electrode fingers on the input side and the output side and the dummy electrodes arranged between them is all four. These do not need to be completely the same number, but it is sufficient as long as they are approximately the same number. The distance d between the nearest electrode fingers between the dummy electrode and the blocks on the input side and the output side was set to %λ0 here.

入力側、出力側。Input side, output side.

およびダミー電極の電極指の線幅と間隔幅はすべて%λ
0である。このように設定すると、入力側櫛型電極21
により励起された弾性表面波はダミー電極26を通り、
出力側の櫛型電極23に至るが、ダミー電極25と櫛型
電極21との反射波の一位相が反転しているため相殺さ
れ、反射は除去される。またこのダミー電極を共通の接
地電極26とすることにより第2図のように効果的に接
地をまとめて実施できる。
And the line width and spacing width of the electrode fingers of the dummy electrode are all %λ
It is 0. With this setting, the input side comb-shaped electrode 21
The surface acoustic wave excited by passes through the dummy electrode 26,
The reflected waves reach the comb-shaped electrode 23 on the output side, but since one phase of the reflected waves from the dummy electrode 25 and the comb-shaped electrode 21 are reversed, they cancel each other out and the reflection is eliminated. Furthermore, by using this dummy electrode as a common grounding electrode 26, grounding can be effectively carried out all at once as shown in FIG.

発明の効果 本発明は電極指における反射を除去したため、通過帯域
内の電極指反射による三重反射波(TTK)か約1sd
B低減し、通過帯域内での振幅特性9位相特性における
リプルが著しく改善された。
Effects of the Invention Since the present invention eliminates the reflection at the electrode finger, the triple reflected wave (TTK) due to the electrode finger reflection within the passband is approximately 1 sd.
B was reduced, and ripples in the amplitude characteristics and phase characteristics within the passband were significantly improved.

通過帯域外では、共通接地電極のンールド効果により、
入出力間の静電結合が小さくなり、10dB以上高域で
の保証減衰量が改善された。
Outside the passband, due to the Nund effect of the common ground electrode,
The capacitive coupling between input and output has been reduced, and the guaranteed attenuation in the high range has been improved by 10 dB or more.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の弾性表面波装置の概要図、第2図は本発
明の一実施例を説明する部分概要図である。 21・・・・・・入力側櫛型電極、23・・・・・・出
力側櫛型電極、26・・・・ダミー電極、26・・・・
・・接地電極。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 □、イC;−
FIG. 1 is a schematic diagram of a conventional surface acoustic wave device, and FIG. 2 is a partial schematic diagram illustrating an embodiment of the present invention. 21... Input side comb-shaped electrode, 23... Output side comb-shaped electrode, 26... Dummy electrode, 26...
...Ground electrode. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 □, A;-

Claims (2)

【特許請求の範囲】[Claims] (1)入力側および出力側の櫛型電極変換器をそれぞれ
電極指を複数個のブロックに分割した間引き型の構成と
し、上記入力側の櫛型電極変換器の電極指を間引いた空
間に上記出力側の電極指のブロックを配置し、上記入力
側および出力側の電極指の間に、上記の電極指のブロッ
クの電極指数とほぼ等しい本数からなるダミー電極を配
置し、上記ダミー電極の電極指の中心間距離をλ_0/
2(λ_0は当該弾性表面波装置の中心周波数における
弾性表面波の波長)、上記ダミー電極と上記入力側およ
び出力側のブロックの最も近接する電極指との中心間距
離を(n/2+1/4)λ_0(nは整数)としたこと
を特徴とする弾性表面波装置。
(1) The comb-shaped electrode transducers on the input side and the output side each have a thinned-out structure in which the electrode fingers are divided into a plurality of blocks, and the electrode fingers of the comb-shaped electrode transducer on the input side are placed in the space where the electrode fingers are thinned out. A block of electrode fingers on the output side is arranged, and between the electrode fingers on the input side and the output side, dummy electrodes having a number approximately equal to the electrode index of the block of electrode fingers are arranged, and the electrodes of the dummy electrode are arranged. The distance between the centers of the fingers is λ_0/
2 (λ_0 is the wavelength of the surface acoustic wave at the center frequency of the surface acoustic wave device), and the distance between the centers of the dummy electrode and the nearest electrode fingers of the input and output blocks is (n/2+1/4). ) λ_0 (n is an integer).
(2)ダミー電極を入力側および出力側の共通接地電極
の電気的接続手段としたことを特徴とする特許請求の範
囲第1項記載の弾性表面波装置。
(2) The surface acoustic wave device according to claim 1, wherein a dummy electrode is used as an electrical connection means for common ground electrodes on the input side and the output side.
JP19715784A 1984-09-20 1984-09-20 Surface acoustic wave device Pending JPS6174409A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19715784A JPS6174409A (en) 1984-09-20 1984-09-20 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19715784A JPS6174409A (en) 1984-09-20 1984-09-20 Surface acoustic wave device

Publications (1)

Publication Number Publication Date
JPS6174409A true JPS6174409A (en) 1986-04-16

Family

ID=16369713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19715784A Pending JPS6174409A (en) 1984-09-20 1984-09-20 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS6174409A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0337703A2 (en) * 1988-04-11 1989-10-18 Hitachi, Ltd. Surface acoustic wave filter
JPH02311007A (en) * 1989-05-26 1990-12-26 Hitachi Ltd Surface acoustic wave device
EP0452105A2 (en) * 1990-04-11 1991-10-16 Fujitsu Limited Saw device having a plurality of electrodes and a fabrication method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0337703A2 (en) * 1988-04-11 1989-10-18 Hitachi, Ltd. Surface acoustic wave filter
JPH02311007A (en) * 1989-05-26 1990-12-26 Hitachi Ltd Surface acoustic wave device
EP0452105A2 (en) * 1990-04-11 1991-10-16 Fujitsu Limited Saw device having a plurality of electrodes and a fabrication method thereof

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