JPS6173671U - - Google Patents

Info

Publication number
JPS6173671U
JPS6173671U JP15887684U JP15887684U JPS6173671U JP S6173671 U JPS6173671 U JP S6173671U JP 15887684 U JP15887684 U JP 15887684U JP 15887684 U JP15887684 U JP 15887684U JP S6173671 U JPS6173671 U JP S6173671U
Authority
JP
Japan
Prior art keywords
ion implantation
vacuum
communication path
detection signal
opening degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15887684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426456Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15887684U priority Critical patent/JPH0426456Y2/ja
Publication of JPS6173671U publication Critical patent/JPS6173671U/ja
Application granted granted Critical
Publication of JPH0426456Y2 publication Critical patent/JPH0426456Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP15887684U 1984-10-19 1984-10-19 Expired JPH0426456Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (cs) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15887684U JPH0426456Y2 (cs) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6173671U true JPS6173671U (cs) 1986-05-19
JPH0426456Y2 JPH0426456Y2 (cs) 1992-06-25

Family

ID=30716843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15887684U Expired JPH0426456Y2 (cs) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPH0426456Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271739A (ja) * 1985-05-22 1986-12-02 バリアン・アソシエイツ・インコ−ポレイテツド イオンド−ズ量の精度を改善するための方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271739A (ja) * 1985-05-22 1986-12-02 バリアン・アソシエイツ・インコ−ポレイテツド イオンド−ズ量の精度を改善するための方法および装置

Also Published As

Publication number Publication date
JPH0426456Y2 (cs) 1992-06-25

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