JPS6173671U - - Google Patents
Info
- Publication number
- JPS6173671U JPS6173671U JP15887684U JP15887684U JPS6173671U JP S6173671 U JPS6173671 U JP S6173671U JP 15887684 U JP15887684 U JP 15887684U JP 15887684 U JP15887684 U JP 15887684U JP S6173671 U JPS6173671 U JP S6173671U
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- vacuum
- communication path
- detection signal
- opening degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15887684U JPH0426456Y2 (cs) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15887684U JPH0426456Y2 (cs) | 1984-10-19 | 1984-10-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6173671U true JPS6173671U (cs) | 1986-05-19 |
JPH0426456Y2 JPH0426456Y2 (cs) | 1992-06-25 |
Family
ID=30716843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15887684U Expired JPH0426456Y2 (cs) | 1984-10-19 | 1984-10-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0426456Y2 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61271739A (ja) * | 1985-05-22 | 1986-12-02 | バリアン・アソシエイツ・インコ−ポレイテツド | イオンド−ズ量の精度を改善するための方法および装置 |
-
1984
- 1984-10-19 JP JP15887684U patent/JPH0426456Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61271739A (ja) * | 1985-05-22 | 1986-12-02 | バリアン・アソシエイツ・インコ−ポレイテツド | イオンド−ズ量の精度を改善するための方法および装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0426456Y2 (cs) | 1992-06-25 |