JPS6173658U - - Google Patents

Info

Publication number
JPS6173658U
JPS6173658U JP4613084U JP4613084U JPS6173658U JP S6173658 U JPS6173658 U JP S6173658U JP 4613084 U JP4613084 U JP 4613084U JP 4613084 U JP4613084 U JP 4613084U JP S6173658 U JPS6173658 U JP S6173658U
Authority
JP
Japan
Prior art keywords
etching
electrode
frequency electrode
vacuum container
etching table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4613084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6333960Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984046130U priority Critical patent/JPS6333960Y2/ja
Publication of JPS6173658U publication Critical patent/JPS6173658U/ja
Application granted granted Critical
Publication of JPS6333960Y2 publication Critical patent/JPS6333960Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1984046130U 1984-03-30 1984-03-30 Expired JPS6333960Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984046130U JPS6333960Y2 (enrdf_load_stackoverflow) 1984-03-30 1984-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984046130U JPS6333960Y2 (enrdf_load_stackoverflow) 1984-03-30 1984-03-30

Publications (2)

Publication Number Publication Date
JPS6173658U true JPS6173658U (enrdf_load_stackoverflow) 1986-05-19
JPS6333960Y2 JPS6333960Y2 (enrdf_load_stackoverflow) 1988-09-08

Family

ID=30560242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984046130U Expired JPS6333960Y2 (enrdf_load_stackoverflow) 1984-03-30 1984-03-30

Country Status (1)

Country Link
JP (1) JPS6333960Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619733A (en) * 1979-07-26 1981-02-24 Sekisui Plastics Co Ltd Fitting mechanism of steam orifice in foamed forming device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619733A (en) * 1979-07-26 1981-02-24 Sekisui Plastics Co Ltd Fitting mechanism of steam orifice in foamed forming device

Also Published As

Publication number Publication date
JPS6333960Y2 (enrdf_load_stackoverflow) 1988-09-08

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