JPS6173658U - - Google Patents
Info
- Publication number
- JPS6173658U JPS6173658U JP4613084U JP4613084U JPS6173658U JP S6173658 U JPS6173658 U JP S6173658U JP 4613084 U JP4613084 U JP 4613084U JP 4613084 U JP4613084 U JP 4613084U JP S6173658 U JPS6173658 U JP S6173658U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- electrode
- frequency electrode
- vacuum container
- etching table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 11
- 238000000992 sputter etching Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984046130U JPS6333960Y2 (cg-RX-API-DMAC7.html) | 1984-03-30 | 1984-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984046130U JPS6333960Y2 (cg-RX-API-DMAC7.html) | 1984-03-30 | 1984-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6173658U true JPS6173658U (cg-RX-API-DMAC7.html) | 1986-05-19 |
| JPS6333960Y2 JPS6333960Y2 (cg-RX-API-DMAC7.html) | 1988-09-08 |
Family
ID=30560242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984046130U Expired JPS6333960Y2 (cg-RX-API-DMAC7.html) | 1984-03-30 | 1984-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333960Y2 (cg-RX-API-DMAC7.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619733A (en) * | 1979-07-26 | 1981-02-24 | Sekisui Plastics Co Ltd | Fitting mechanism of steam orifice in foamed forming device |
-
1984
- 1984-03-30 JP JP1984046130U patent/JPS6333960Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619733A (en) * | 1979-07-26 | 1981-02-24 | Sekisui Plastics Co Ltd | Fitting mechanism of steam orifice in foamed forming device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6333960Y2 (cg-RX-API-DMAC7.html) | 1988-09-08 |