JPS6173653U - - Google Patents

Info

Publication number

JPS6173653U

JPS6173653U JP15824884U JP15824884U JPS6173653U JP S6173653 U JPS6173653 U JP S6173653U JP 15824884 U JP15824884 U JP 15824884U JP 15824884 U JP15824884 U JP 15824884U JP S6173653 U JPS6173653 U JP S6173653U

Authority

JP

Japan

Prior art keywords

evaporation source

vacuum

thin film

sample chamber

chamber

Prior art date

1984-10-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001704 evaporation Methods 0.000 claims description 6
• 230000008020 evaporation Effects 0.000 claims description 6
• 238000001514 detection method Methods 0.000 claims description 3
• 230000001105 regulatory effect Effects 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims 4
• 238000005192 partition Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 238000007738 vacuum evaporation Methods 0.000 description 3
• 230000002123 temporal effect Effects 0.000 description 1

Cited By (1)