JPS6172850U - - Google Patents

Info

Publication number

JPS6172850U

JPS6172850U JP15745384U JP15745384U JPS6172850U JP S6172850 U JPS6172850 U JP S6172850U JP 15745384 U JP15745384 U JP 15745384U JP 15745384 U JP15745384 U JP 15745384U JP S6172850 U JPS6172850 U JP S6172850U

Authority

JP

Japan

Prior art keywords

silicon

dioxide layer

silicon dioxide

phenomenon

charge

Prior art date

1984-10-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• 235000012239 silicon dioxide Nutrition 0.000 claims description 4
• 239000000377 silicon dioxide Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1