JPS6171238U - - Google Patents
Info
- Publication number
- JPS6171238U JPS6171238U JP15547484U JP15547484U JPS6171238U JP S6171238 U JPS6171238 U JP S6171238U JP 15547484 U JP15547484 U JP 15547484U JP 15547484 U JP15547484 U JP 15547484U JP S6171238 U JPS6171238 U JP S6171238U
- Authority
- JP
- Japan
- Prior art keywords
- mesh
- processing apparatus
- reaction products
- plasma processing
- vacuum gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547484U JPS6171238U (ru) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547484U JPS6171238U (ru) | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6171238U true JPS6171238U (ru) | 1986-05-15 |
Family
ID=30713485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15547484U Pending JPS6171238U (ru) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6171238U (ru) |
-
1984
- 1984-10-15 JP JP15547484U patent/JPS6171238U/ja active Pending
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