JPS6170934U - - Google Patents
Info
- Publication number
- JPS6170934U JPS6170934U JP15574084U JP15574084U JPS6170934U JP S6170934 U JPS6170934 U JP S6170934U JP 15574084 U JP15574084 U JP 15574084U JP 15574084 U JP15574084 U JP 15574084U JP S6170934 U JPS6170934 U JP S6170934U
- Authority
- JP
- Japan
- Prior art keywords
- immersion
- immersion liquid
- treated
- treatment
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007654 immersion Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 10
- 230000032258 transport Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15574084U JPS6170934U (enExample) | 1984-10-17 | 1984-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15574084U JPS6170934U (enExample) | 1984-10-17 | 1984-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170934U true JPS6170934U (enExample) | 1986-05-15 |
Family
ID=30713753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15574084U Pending JPS6170934U (enExample) | 1984-10-17 | 1984-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170934U (enExample) |
-
1984
- 1984-10-17 JP JP15574084U patent/JPS6170934U/ja active Pending
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