JPS6170927U - - Google Patents
Info
- Publication number
- JPS6170927U JPS6170927U JP15547984U JP15547984U JPS6170927U JP S6170927 U JPS6170927 U JP S6170927U JP 15547984 U JP15547984 U JP 15547984U JP 15547984 U JP15547984 U JP 15547984U JP S6170927 U JPS6170927 U JP S6170927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- cylinder
- semiconductor substrate
- gas passage
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims 6
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547984U JPS6170927U (enExample) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15547984U JPS6170927U (enExample) | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170927U true JPS6170927U (enExample) | 1986-05-15 |
Family
ID=30713490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15547984U Pending JPS6170927U (enExample) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170927U (enExample) |
-
1984
- 1984-10-15 JP JP15547984U patent/JPS6170927U/ja active Pending
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