JPS6170673U - - Google Patents

Info

Publication number
JPS6170673U
JPS6170673U JP15681984U JP15681984U JPS6170673U JP S6170673 U JPS6170673 U JP S6170673U JP 15681984 U JP15681984 U JP 15681984U JP 15681984 U JP15681984 U JP 15681984U JP S6170673 U JPS6170673 U JP S6170673U
Authority
JP
Japan
Prior art keywords
valve body
ultra
high vacuum
vacuum gate
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15681984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15681984U priority Critical patent/JPS6170673U/ja
Publication of JPS6170673U publication Critical patent/JPS6170673U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)
JP15681984U 1984-10-17 1984-10-17 Pending JPS6170673U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15681984U JPS6170673U (enrdf_load_stackoverflow) 1984-10-17 1984-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15681984U JPS6170673U (enrdf_load_stackoverflow) 1984-10-17 1984-10-17

Publications (1)

Publication Number Publication Date
JPS6170673U true JPS6170673U (enrdf_load_stackoverflow) 1986-05-14

Family

ID=30714824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15681984U Pending JPS6170673U (enrdf_load_stackoverflow) 1984-10-17 1984-10-17

Country Status (1)

Country Link
JP (1) JPS6170673U (enrdf_load_stackoverflow)

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