JPS617027U - Fine movement mechanism - Google Patents

Fine movement mechanism

Info

Publication number
JPS617027U
JPS617027U JP9153384U JP9153384U JPS617027U JP S617027 U JPS617027 U JP S617027U JP 9153384 U JP9153384 U JP 9153384U JP 9153384 U JP9153384 U JP 9153384U JP S617027 U JPS617027 U JP S617027U
Authority
JP
Japan
Prior art keywords
fine movement
movement mechanism
leaf spring
relay plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9153384U
Other languages
Japanese (ja)
Inventor
嘉信 北田
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to JP9153384U priority Critical patent/JPS617027U/en
Publication of JPS617027U publication Critical patent/JPS617027U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は本考案の微動機構の一実施例を示し、
第１図は側面図、第２図は微動調整時の側面図、第３図
、第４図は従来の微動機構を示し、第３図は側面図、第
４図は微動調整時の側面図である。 １・・・ステージ、３．３’・・・板バネ、４・・・中
継板、５，５′・・・較正板バネ。1 and 2 show an embodiment of the fine movement mechanism of the present invention,
Figure 1 is a side view, Figure 2 is a side view during fine adjustment, Figures 3 and 4 show a conventional fine adjustment mechanism, Figure 3 is a side view, and Figure 4 is a side view during fine adjustment. It is. 1... Stage, 3.3'... Leaf spring, 4... Relay plate, 5, 5'... Calibration leaf spring.

Claims (1)

【実用新案登録請求の範囲】 相対向する板バネによりステージを水平方向に微動させ
る微動機構であって、 前記板バネを中継板に配設するとともに、この中継板に
、前記板バネの微動時における非水平方向の変位を相殺
すべく形成した較正板バネを配設したことを特徴とする
微動機構。[Claims for Utility Model Registration] A fine movement mechanism for slightly moving a stage in the horizontal direction by opposing leaf springs, wherein the leaf spring is disposed on a relay plate, and the relay plate is provided with a mechanism for fine movement of the leaf spring. A fine movement mechanism characterized by having a calibration plate spring formed to offset non-horizontal displacement of the .
JP9153384U 1984-06-18 1984-06-18 Fine movement mechanism Pending JPS617027U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9153384U JPS617027U (en) 1984-06-18 1984-06-18 Fine movement mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9153384U JPS617027U (en) 1984-06-18 1984-06-18 Fine movement mechanism

Publications (1)

Publication Number Publication Date
JPS617027U true JPS617027U (en) 1986-01-16

Family

ID=30647509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9153384U Pending JPS617027U (en) 1984-06-18 1984-06-18 Fine movement mechanism

Country Status (1)

Country Link
JP (1) JPS617027U (en)

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