JPS6169693U - - Google Patents

Info

Publication number
JPS6169693U
JPS6169693U JP15449784U JP15449784U JPS6169693U JP S6169693 U JPS6169693 U JP S6169693U JP 15449784 U JP15449784 U JP 15449784U JP 15449784 U JP15449784 U JP 15449784U JP S6169693 U JPS6169693 U JP S6169693U
Authority
JP
Japan
Prior art keywords
heat exchange
exchange panel
aluminum alloy
stainless steel
rack type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15449784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0120550Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15449784U priority Critical patent/JPH0120550Y2/ja
Publication of JPS6169693U publication Critical patent/JPS6169693U/ja
Application granted granted Critical
Publication of JPH0120550Y2 publication Critical patent/JPH0120550Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
  • Details Of Heat-Exchange And Heat-Transfer (AREA)
JP15449784U 1984-10-12 1984-10-12 Expired JPH0120550Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15449784U JPH0120550Y2 (enrdf_load_stackoverflow) 1984-10-12 1984-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15449784U JPH0120550Y2 (enrdf_load_stackoverflow) 1984-10-12 1984-10-12

Publications (2)

Publication Number Publication Date
JPS6169693U true JPS6169693U (enrdf_load_stackoverflow) 1986-05-13
JPH0120550Y2 JPH0120550Y2 (enrdf_load_stackoverflow) 1989-06-20

Family

ID=30712489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15449784U Expired JPH0120550Y2 (enrdf_load_stackoverflow) 1984-10-12 1984-10-12

Country Status (1)

Country Link
JP (1) JPH0120550Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336978A (ja) * 1986-07-29 1988-02-17 Ishikawajima Harima Heavy Ind Co Ltd 容器等における異種金属継手
WO2009025362A1 (ja) * 2007-08-23 2009-02-26 Tokyo Electron Limited 気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336978A (ja) * 1986-07-29 1988-02-17 Ishikawajima Harima Heavy Ind Co Ltd 容器等における異種金属継手
WO2009025362A1 (ja) * 2007-08-23 2009-02-26 Tokyo Electron Limited 気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置

Also Published As

Publication number Publication date
JPH0120550Y2 (enrdf_load_stackoverflow) 1989-06-20

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